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Search This Product Catalog By Keyword By GTIN(UPC/EAN) By 3M Id Electronics Manufacturing Product Catalog for Electronics Manufacturing 3M™ Bonding Tapes & Adhesives 3M™ Electronic Solutions Products 3M™ Electronic Specialty Markets 3M™ Insulation & Protection 3M™ Interconnect Solutions 3M™ Personal Safety Products 3M™ Tapes 3M™ Telecommunications OEM Center Electronic Materials

Product Catalog for Electronics Manufacturing Electronic Materials  Printer-friendly format 3M™ Specialty Gases Specialty gases are used in removing material buildup from chemical vapor deposition (CVD) reactor chambers in semiconductor manufacturing. Offers reduced emission, lower gas usage rates and faster chamber cleaning. Make a Selection 3M™ Specialty Gas PFG-3218 PFG-3218 gas (C3F8) lowers gas useage and PFC emissions in CVD chamber cleaning while maintaining a level of cleaning performance comparable to C2F6. 3M™ Specialty Gas PFG-3480 PFG-3480 gas (C4F8O) dramatically lowers PFC emissions in CVD chamber cleaning, offering both economic and environmental advantages.

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