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Product Catalog for 3M Superbrasives and Microabrasives 3M™ Microabrasive Products 3M™ SlurryFree™ CMP Fixed Abrasive

 Printer-friendly format 3M™ SlurryFree™ CMP Fixed Abrasive Oxide Rolls
3M™ SlurryFree™ CMP [click to enlarge]
High performance, ceria based fixed abrasive CMP consumable.

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3M™ SlurryFree™ CMP Fixed Abrasive M2100 Rolls
Ceria based fixed abrasive consumable for high planarity ILD polish for use on web-based F/A CMP tools.

3M™ SlurryFree™ CMP Fixed Abrasive M3100 Rolls
High performance, ceria based fixed abrasive consumable for single-step STI polish for advance semiconductor devices. Product for use with web-based CMP tools.


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