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Product Catalog for 3M Superbrasives and Microabrasives 3M™ Microabrasive Products

 Printer-friendly format 3M™ SlurryFree™ CMP Fixed Abrasive
3M™ SlurryFree™ CMP [click to enlarge]
3M's advanced technologies for slurry-free chemical mechanical planarization (CMP) polishing of semiconductors.

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3M™ SlurryFree™ CMP Fixed Abrasive Oxide Rolls
High performance, ceria based fixed abrasive CMP consumable.

3M™ SlurryFree™ CMP Fixed Abrasive P6900 Sub Pads
Composite subpad for use with 3M™ SlurryFree™ CMP rolls. Specific constructions and sizes for use on web-based CMP tools.


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