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Search This Product Catalog By Keyword By GTIN(UPC/EAN) By 3M Id Abrasive Finishing Solutions Product Catalog for 3M™ Superbrasives and Microabrasives Solutions Abrasive Industrial Applications Abrasive Opto-Electronic Applications Abrasive Semiconductor Applications

Product Catalog for 3M™ Superbrasives and Microabrasives Solutions Abrasive Semiconductor Applications  Printer-friendly format Semiconductor CMP - Wafer Planarization [click to enlarge] 3M's innovative structured abrasive CMP product offers superior planarization and eliminates traditional slurries and pads in the chemical mechanical planarization of semiconductor wafers. Additional Information Learn More . . .   Fixed Abrasives and Selective Chemistries PDF - Article Reprint (PDF 289.0 K)   SlurryFree™ CMP Technical Brief PDF - Technical Paper (PDF 339.2 K) Please Note: Adobe® Acrobat® Reader is required to view PDF documents. Make a Selection 3M™ SlurryFree™ CMP Fixed Abrasive Oxide Rolls High performance, ceria based fixed abrasive CMP consumable. 3M™ SlurryFree™ CMP Fixed Abrasive P6900 Sub Pads Composite subpad for use with 3M™ SlurryFree™ CMP rolls. Specific constructions and sizes for use on web-based CMP tools.

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